Agilent/Keysight 5510A

The Agilent/Keysight 5510A is a HeNe laser head that produces a stable, coherent two-frequency beam at 632.991 nm for precision metrology and dimensional measurement systems. It generates orthogonally polarized frequency components with output power up to 1 milliwatt and delivers wavelength accuracy of ±0.1 ppm (vacuum, lifetime) or ±0.02 ppm with factory calibration to MIL-STD 456663. The collimated beam exhibits divergence less than 0.9 mrad (full angle) and maintains exceptional stability of ±0.002 ppm over one hour under vacuum conditions.

– Technical Specifications

• Wavelength: 632.991 nm with ±0.1 ppm accuracy (vacuum, 3 sigma, lifetime)
• Output Power: 1 milliwatt maximum; minimum power varies by model (5517A: >180 µW, 5517B: 120 µW, 5517C: 180 µW)
• Frequency Components: Two orthogonally polarized frequencies (reference range 1.5–3.0 MHz depending on model variant)
• Beam Divergence: 50,000 hours typical
• Dimensions (5517C): 127 mm (H) × 102 mm (W) × 152 mm (D)
• Weight (5517B/C): 3.4 kg (7.5 lb)
• Laser Safety: Class II product per 21 CFR 1040.10 and 1040.11

– Key Features

• Dual-frequency orthogonal polarization for heterodyne interferometry applications
• Vacuum-stable wavelength reference traceable to optical frequency standards
• Flexible mounting in any orientation with specified angular tolerances relative to beam-splitter and interferometer housings
• Long operational life with established reliability metrics

– Typical Applications

Semiconductor process metrology, disk drive head positioning, precision machine tool calibration, and dimensional coordinate measurement systems requiring sub-micron accuracy.

– Compatibility & Integration

Designed as a laser source component for larger interferometric measurement systems. Output beam geometry and frequency characteristics support integration with standard optical bench configurations and servo-controlled positioning platforms.