Keysight / Agilent B1517A High Resolution SMU Module

The Keysight B1517A High Resolution SMU Module is a plug-in source and measurement unit for the B1500A Semiconductor Device Analyzer, engineered for precision DC characterization of semiconductors and nanodevices. It delivers current resolution to 1 fA and voltage resolution to 0.5 µV, enabling sensitive measurements across a ±100 V and ±100 mA range. The module supports spot, sweep, pulse, and sampling measurements, along with Quasi-Static Capacitance-Voltage (QS-CV) characterization with integrated leakage current compensation. Its Kelvin connection architecture via dedicated Force/Sense terminals ensures accurate low-resistance measurement. Four-quadrant operation and 2 W maximum output power accommodate diverse device testing scenarios.

For applications demanding sub-fA sensitivity, the B1517A integrates with the optional Atto Sense and Switch Unit (ASU)—such as the E5288A—extending measurement capability to 100 aA resolution. The module occupies a single B1500A slot within the configurable mainframe architecture supporting up to five measurement modules. Sampling measurements operate at minimum 100 µs intervals, while pulse measurements maintain a 500 µs minimum width. Control and automation occur within the Keysight EasyEXPERT software environment, providing integrated test configuration and data acquisition for advanced device physics and reliability research.

– Technical Specifications

• Voltage Source/Measurement Range: ±100 V
• Current Source/Measurement Range: ±100 mA
• Current Resolution: 1 fA minimum
• Voltage Resolution: 0.5 µV minimum
• Output Power: 2 W maximum
• Sampling Interval: 100 µs minimum
• Pulse Width: 500 µs minimum
• Measurement Modes: Spot, sweep, pulse, sampling
• 4-Quadrant Operation: Supported

– Key Features

• Quasi-Static Capacitance-Voltage (QS-CV) measurement with leakage current compensation
• Kelvin Force/Sense connection for precision low-resistance measurement
• Optional ASU integration for sub-fA current measurement down to 100 aA
• Single-slot modular architecture within B1500A mainframe

– Typical Applications

• Semiconductor device DC characterization
• Carbon nanotube and nanowire analysis
• Materials research and device physics
• Nanodevice leakage current measurement

– Compatibility & Integration

• Host: Keysight B1500A Semiconductor Device Analyzer
• Optional Modules: Atto Sense and Switch Unit (e.g., E5288A) via D-sub connector
• Software: Keysight EasyEXPERT