The Advantest R6561 is a 6 1/2-digit digital multimeter engineered for precision DC voltage, micro-DC voltage, and resistance measurements in research and semiconductor applications. It delivers 10 nV sensitivity for micro-DC measurements and 1 μΩ resolution for resistance, supported by automatic offset cancellation and floating current source topology to eliminate thermal EMF and line resistance effects. Sampling rates reach 2,000 times per second with multi-sampling bulk output, enabling real-time data collection at 10 msec intervals in 6 1/2 digit mode. Digital smoothing via moving average reduces noise without sacrificing measurement speed, while null function capability supports micro-resistance and offset voltage compensation.
– Technical Specifications
• Display: 6 1/2 digits (maximum reading 1199999)
• DC Voltage sensitivity: 10 nV (micro-DC)
• Resistance resolution: 1 μΩ (4-wire)
• Sampling rate: 2,000 samples per second
• Data output interval: 10 msec (6 1/2 digit mode)
• Low Power mode terminal voltage: 20 mVpeak or less
• Temperature coefficient range: +18°C to +28°C (standard); 0°C to +18°C and +28°C to +40°C with +0.0001 adjustment to % reading
• 2-wire resistance accuracy: +0.2 Ω maximum additional error versus 4-wire measurement
– Key Features
• Automatic offset cancellation and floating current source eliminate thermal EMF and parasitic resistance
• Multi-sampling bulk output mode for high-speed data acquisition
• Digital smoothing with moving average for low-signal reliability
• Null function for connection cable error measurement and offset voltage compensation
• Auto zero and auto calibration maintain accuracy with 1 hour calibration interval
• Measurement accuracy expressed as ± (% of reading + LS digit value)
– Typical Applications
• Semiconductor device characterization
• Contact resistance and low-resistance component testing
• Superconductor and metal material measurements
• Basic research in electronic component evaluation
– Compatibility & Integration
Detailed accuracy specifications for 6 1/2 digit measurements are documented in the R6871E brochure.




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