The Keysight 10706A is a dual-pass plane mirror interferometer for laser beam steering and positioning in precision metrology systems. It enables accurate redirection of laser beam paths essential for interferometer applications and high-precision measurement setups, with tolerance to angular misalignment of the plane mirror reflector. The 10706A operates as a single-axis interferometer and includes two retroreflectors and one quarter-wave plate as standard components. The laser beam path can be reconfigured by interchanging the reference retroreflector and quarter-wave plate. It is not suitable for use as a moving component in measurement systems.
– Technical Specifications
• Maximum beam size: 6 mm
• Beam separation: 12.7 mm (0.5 in)
• Weight: 308 g (10.9 oz)
• Fundamental optical resolution: λ/4 (158.2 nm, 6.2 µin)
• System resolution with 32× electronic extension: λ/128 (5 nm, 0.2 µin)
• System resolution with 256× electronic extension: λ/1024 (0.62 nm, 0.024 µin)
– Key Features
• Dual-pass interferometer architecture suitable for multi-axis applications (X-Y stages)
• Angular misalignment tolerance of plane mirror reflector
• Convertible beam path configuration via component interchange
• Supports differential operation when paired with 10722A Plane Mirror Converter
• Can be upgraded to 10706B High Stability configuration using 10723A High Stability Adapter for improved thermal stability
– Typical Applications
• Multi-axis stage measurement (X-Y positioning)
• Laser interferometer positioning systems
• High-precision dimensional metrology
• Applications requiring measurement mirror movement perpendicular to measurement axis
– Compatibility & Integration
• Reflector: 10724A Plane Mirror Reflector or user-supplied plane mirrors
• Mount: 10711A
• System integration: Compatible with Keysight 107xx Series optics, Keysight laser heads (5517A, 5517B, 5518A), and 109xx Series electronics
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