Agilent/Keysight 10719A

The Keysight 10719A is a one-axis differential interferometer for precision linear or angular measurements in demanding metrology and interferometry applications. It delivers high accuracy and mechanical stability through monolithic optics and enables differential displacement gauging between two objects—such as a wafer stage and optics column—while also measuring pitch or roll. Angular measurements are performed when both reference and measurement beams interact with the same mirror. The compact 3 mm beam minimizes Abbe offset error, and the 19.05 mm beam separation provides superior rejection of unwanted interferometer displacement from thermal expansion.

– Technical Specifications

• Measurement Type: One-axis differential linear or angular
• Beam Diameter: Maximum 3 mm
• Beam Separation: 19.05 mm (0.75 in)
• Fundamental Optical Resolution: λ/4 (158.2 nm, 6.2 µin) linear; 1.71 arcsec (8.3 µrad) angular
• System Resolution (32× electronic extension): λ/128 (5 nm, 0.2 µin) linear; 0.054 arcsec (0.26 µrad) angular
• System Resolution (256× electronic extension): λ/1024 (0.62 nm, 0.024 µin) linear; 0.007 arcsec (0.03 µrad) angular
• Weight: 300 g (10.6 oz)
• Reflector Type: Custom
• Mount: Custom

– Key Features

• Monolithic optical design maximizes mechanical stability
• Differential configuration provides high immunity to thermal expansion and system-level displacement
• Shear plate for parallel beam path generation
• One retroreflector and two quarter-wave plates included
• Referenced design for absolute measurement capability

– Typical Applications

• Semiconductor fabrication equipment—wafer stage referencing to optics columns
• Precision displacement gauging between stage and optical assemblies
• Pitch and roll measurement
• Multi-axis interferometry systems

– Compatibility & Integration

The 10719A operates with specific laser heads such as the 5517C Option 003, which provides the required 3 mm beam diameter. It integrates with other Keysight laser interferometer components. For two-axis differential measurements, the Keysight 10721A is available. Linear measurements require user-supplied reference and measurement mirrors; angular measurements require one mirror to reflect both beams.