Agilent/Keysight 10736A

The Keysight 10736A is a three-axis interferometer designed for precision displacement and angular measurements in a single integrated optical package. It simultaneously measures linear distance, pitch, yaw, and roll by combining beam benders, beam splitters, and three interferometers into one unit. This integrated architecture reduces setup complexity and minimizes cosine error in multi-axis positioning applications.

– Technical Specifications

Measurement Capabilities
• Three linear measurements (X-axis displacement, Z-axis yaw, Y-axis pitch) or one linear and two angular measurements
• Fundamental optical resolution: λ/4 (158.2 nm, 6.2 µin)
• System resolution with 32× electronic extension: displacement λ/128 (5 nm, 0.2 µin); yaw 0.039 arcsec (0.19 µrad); pitch 0.049 arcsec (0.24 µrad)
• System resolution with 256× electronic extension: displacement λ/1024 (0.62 nm, 0.024 µin); yaw 0.0049 arcsec (0.024 µrad); pitch 0.0061 arcsec (0.029 µrad)
• System resolution with 1024× electronic extension: displacement λ/4096 (0.15 nm, 0.006 µin); yaw 0.0012 arcsec (0.006 µrad); pitch 0.0015 arcsec (0.007 µrad)

Optical Specifications
• Beam diameter: 6 mm standard; 9 mm with Option 009
• Maximum beam size: 9 mm
• Input aperture: 5.5 mm × 11.0 mm
• Referenced optics included

Physical Specifications
• Dimensions: 273 mm × 216 mm × 94 mm
• Weight: 2.3 kg

– Key Features

• Integrated three-axis optical design eliminates separate component alignment
• Includes two shear plates, three cube corners, one reference mirror, and two quarter-wave plates
• Option 001 provides axis bending capability
• Compatible with 10728A reflector
• Custom mount accommodation

– Typical Applications

Semiconductor manufacturing, precision engineering, optical alignment, and multi-axis positioning systems requiring sub-nanometer displacement resolution and sub-arcsecond angular accuracy.

– Compatibility & Integration

Works with Keysight laser interferometer positioning systems. Reflector: 10728A. Option 009 supports use with 10735A and 10736A systems requiring expanded angular measurement range.