Agilent/Keysight 5517DL

The Keysight 5517DL is a helium-neon laser head delivering stabilized 633 nm output for precision interferometry and metrology. This Class II HeNe laser provides wavelength stability of 2 ppb over one hour and accuracy to ±0.1 ppm standard, with optional calibration reducing this to ±0.02 ppm. Output power ranges from 180 µW nominal (120 µW after three years) to 1 mW maximum, with power stability maintained at ±0.3% and long-term drift under 1% per 8 hours.

– Technical Specifications

Laser Performance
• Wavelength: 633 nm (632.8 nm or 632.991 nm)
• Wavelength stability: 2 ppb (1 hour), 20 ppb (lifetime)
• Wavelength accuracy: ±0.1 ppm standard; ±0.02 ppm with optional calibration
• Power stability: ±0.3%; long-term drift <1% per 8 hours
• Output power: 180 µW nominal to 1 mW maximum
• Beam diameter: 6 mm standard (9 mm option available)
• Beam divergence: 50,000 hours typical

Physical & Electrical
• Dimensions: 145 × 124 × 260 mm; Weight: 3.2 kg
• Input power: +15 V ± 0.3 V @ 3.0 A max; -15 V ± 0.3 V @ 0.3 A max
• Power supply: Keysight 10884B or equivalent required
• Heat dissipation: 23 W operational, 35 W warmup
• Operating temperature: 10–40 °C
• Mounting: Three feet with M8 × 1.25 tapped holes
• Warm-up time: 45 minutes (with vented cover); <10 minutes typical (5517A); 90 minutes (5517D with vent body)

– Key Features

• Orthogonally polarized frequency components (f1 Horizontal, f2 Vertical)
• Beam height: 80.8 mm ± 1.0 mm (5517xL heads)
• Minimal power degradation: 50 µW after three years (Option 300)
• Compact footprint suitable for integration into measurement systems

– Typical Applications

• VME and PC-based laser interferometer systems
• Semiconductor lithography and flat panel manufacturing
• Precision dimensional metrology and calibration
• Advanced measurement systems requiring sub-ppm wavelength accuracy

– Compatibility & Integration

Integrates with Keysight 5529A Dynamic Calibrator systems. Requires E1709A receiver for specified linear velocity performance.