The Keysight E1715A is a 3-axis compact interferometer designed for precision laser metrology applications requiring exceptional pointing stability and minimal nonlinearity error. Built on monolithic optics architecture, it delivers λ/4 optical resolution with ±0.5 nm nonlinearity error across all measurement axes. The instrument integrates remote sensors via ST connectors, eliminating separate sensor mounting complexity while supporting plastic or glass optical fibers in multiple lengths.
– Technical Specifications
Optical Performance
• Beam diameter: Φ4 mm maximum (visible)
• Optical resolution: λ/4 with plane mirror
• Nonlinearity error: ±0.5 nm
• Output efficiency: 18% typical, 12% worst case (all axes)
• Measure point tolerance (absolute): ±0.5 mm
• Beam parallelism: <25 μrad (Axis #1 to Axis #2 and Axis #1 to Axis #3)
• Fiber output coupling: 400-micron fiber, NA 0.39
Input Beam Specifications
• Straight-through configuration: <1 mrad cone angle
• With input bending mirror option: <10 mrad cone angle
Environmental & Mechanical
• Operating temperature: 18°C to 26°C
• Thermal drift: 92% reflectivity, λ/20 flatness
– Typical Applications
Precision displacement and positioning measurement in laser-based metrology systems where low nonlinearity and stable beam pointing are critical.
– Compatibility & Integration
Mounts via four M4 × 0.7 mm captive socket head screws. Requires customer frame with 0.02 mm surface profile and 0.40 μm surface finish.
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