The Agilent/Keysight P9002A is a parallel parametric test system engineered for high-throughput semiconductor wafer testing. It bridges serial testing and advanced per-pin parallel testing with flexible, license-based configurations. The system delivers cost-effective, productive parametric characterization across diverse device types and test scenarios.
– Technical Specifications
• Measurement Pins: Up to 100
• SPGU Output Channels: 4 channels maximum
• Voltage Measurement Resolution: 2 µV minimum
• Current Measurement Resolution: 0.1 fA minimum
• Measurement Functions: Voltage, current, capacitance, and frequency (per pin, as licensed)
• Test Capabilities: IV measurement, capacitance measurement, frequency measurement, pulsed measurement
– Key Features
• Parallel and synchronous/asynchronous testing via SPECS Parallel Test Extension
• Source Monitor Units available in Medium Power and High Power configurations
• Optional modules: digital multimeter, LCR meter, high-voltage semiconductor pulse generator, spectrum analyzer
• Industrial PC controller running Red Hat Enterprise Linux
• Intuitive test application development environment with flexible sequence and flow control
• 36-month software subscription service included
• Offline debug environment for test plan development
– System Architecture
The P9002A comprises a system cabinet and test head designed for integration with production-line probers. Temperature extension and 4080 probe card adapter options are available for test head customization.
– Compatibility & Integration
The system provides software compatibility with Keysight 4080 Series parametric testers, enabling reuse of existing test programs, test plans, and probe cards. Data correlation with the 4080 Series is proven. Migration from 4080 environments is streamlined. Keysight SPECS-FA (Factory Automation) version supports semiconductor wafer production and factory automation workflows.
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