Cascade Microtech MPS150 Manual Probe Station

The Cascade Microtech MPS150 is a manual probe station engineered for precise testing of wafers and substrates up to 150 mm in diameter. It offers a stable and modular platform designed to accommodate a variety of applications and accessories, facilitating accurate measurements through precise probe positioning. Its design emphasizes ease of use with an ergonomic layout and a low-profile form factor.

## Technical Specifications

### Mechanical Performance

* **Chuck Stage Travel:** 155 mm x 155 mm (6 in. x 6 in.)
* **Chuck Stage Resolution:** 5 µm
* **Planarity over 150 mm (6 inch):** < 10 µm * **Load Stroke (Y-axis):** 90 mm * **Z-Height Adjustment Range:** 10 mm * **Z-Contact/Separation/Over-travel:** 200 µm (highly-repeatable contact separation) * **Theta Travel (Standard):** Not specified * **Theta Travel (Fine):** Not specified * **Theta Resolution:** Not specified * **Platen Height Adjustment:** Up to 40 mm * **Platen Space (Typical):** Not specified * **Microscope Stage Travel (Manual):** Not specified * **Microscope Lift (Manual):** Manual, tilt-back or linear pneumatic * **Microscope Stage Travel (Programmable):** Not specified * **Microscope Lift (Programmable):** Not specified### Wafer Chuck* **Standard Chuck:** Stainless steel with centric-engraved vacuum grooves * **Chuck Surface Planarity:** Not specified * **Wafer Size Capacity:** 25 mm (1 inch) through 150 mm (6 inch) * **Auxiliary Chucks:** Up to 18 mm x 26 mm * **TRIAX Chuck:** ±8 fine theta chuck rotation, three auxiliary areas, ±5 µm planarity for consistent contact force and overtravel### Thermal Chuck Performance (for compatible models)* **Temperature Range:** 30°C to 300°C * **Temperature Resolution:** 0.1°C * **Temperature Accuracy:** ± 0.1°C * **Chuck Diameter:** 150 mm nominal * **Thermal Uniformity:** ≤ 0.5°C @ 25°C, ≤ 2°C @ 200°C * **Flatness/Parallelism:** ≤ 30 µm over full temperature range * **Isolation (Non-Thermal Chucks):** 1x10¹¹ Ω @ 25°C, 1x10¹⁰ Ω @ 200°C * **Isolation (Thermal Chucks):** Breakdown voltage (Force-to-guard) specified for specific models (e.g., MPS-TC150-300C1) * **Leakage Current (Triax Setup):** Typically < 3 fA at 1 kHz, 10V (Dependent on atmosphere and humidity)### Electrical Performance (Triaxial Setup)* **Minimum Leakage Current:** Specified down to fA levels * **Minimum Measurement Resolution:** Specified down to fF levels (with upgrade option) * **Test Conditions for Leakage:** Force 10 V on each SMU; integration time - long; limit range - fixed 10 pA; measure current * **Noise and Leakage Measurement:** Typically < 3 fA at 1 kHz### Physical Dimensions* **Station Platform (with Bridge):** 588 mm (W) x 638 mm (D) x 654 mm (H) (23 in. x 25 in. x 26 in.) * **Weight:** ~60 kg (132 lb.)### Facility Requirements* **Power (Base Machine):** Not required * **Vacuum:** -0.8 bar * **Compressed Air:** 4 bar * **Supply Voltage (for specific components/options):** 100/230 VAC 50/60 Hz * **Supply Air (for specific components/options):** 350 liters/min (12.4 SCFM) * **Power Consumption (for specific components/options):** 530 VA (typical)### Compatibility and ApplicationsThe Cascade Microtech MPS150 is designed to support a broad range of applications, including:* C-V/I-V Measurements * RF Measurements * mm-Wave and sub-THz Measurements * Device and Wafer Characterization Tests (DWC) * Failure Analysis (FA) * Submicron Probing * MEMS Testing * Optoelectronic Engineering Tests * Wafer-Level Reliability (WLR) Applications * High-Current Measurements (up to 100 A with specific configurations) * On-wafer power device characterization * Load-pull applications### Regulatory Compliance* **Certification:** CE, cNRTLus, CB### Ordering Information (Example Configurations)The MPS150 is available in pre-configured application-dedicated packages:* **EPS150COAX:** 150 mm manual probing solution for DC parametric test * **EPS150COAXPLUS:** 150 mm manual probing solution for DC parametric test (including platen lift) * **EPS150TRIAX:** 150 mm manual probing solution for low-noise measurements * **EPS150RF:** 150 mm manual probing solution for RF applications * **EPS150MMW:** 150 mm manual probing solution for mmW, THz and load pull applications * **EPS150FA:** 150 mm manual probing solution for failure analysisWhy Choose Aumictech for Cascade Microtech MPS150? At Aumictech, we specialize in supplying high-end wafer probing equipment. Whether you need robust solutions for DC parametric testing, low-noise measurements for sensitive applications, or advanced configurations for RF and mm-Wave characterization, our team ensures the Cascade Microtech MPS150 delivers maximum performance for your application.