Cascade Microtech RF-1 High Frequency Probe

The Cascade Microtech RF-1 is a specialized RF probe designed for high-frequency on-wafer measurements, offering precise signal integrity for RF and microwave testing applications. Its construction emphasizes durability and accurate tip placement, crucial for reliable semiconductor testing. Cascade Microtech, now part of FormFactor, Inc., has a long history in developing advanced probing solutions, dating back to the early 1980s with the introduction of their first microwave wafer probe.

### Technical Specifications

* **Product Type:** RF Probe Station Component
* **Manufacturer:** Cascade Microtech (now FormFactor, Inc.)
* **Model:** RF-1
* **Application:** RF and microwave on-wafer measurements, semiconductor testing, device characterization, and modeling.
* **Frequency Range:** Capable of supporting measurements from DC up to Terahertz frequencies, depending on the specific probe configuration and associated equipment.
* **Measurement Capabilities:** Supports a wide range of measurements including IV/CV, RF, mm-Wave, and Terahertz applications.
* **Chuck:** Features a 6″/150mm vacuum chuck.
* **Microscope:** Often integrated with a Leica S6E trinocular stereozoom microscope offering 6.3x-40x zoom magnification with a 36.5mm field of view and 110mm working distance. Some configurations may include high-resolution microscopes with optical resolutions down to 1 µm.
* **Positioners:** Manual and motorized probe positioners are available, engineered for high stability, accuracy, and precise, repeatable probe tip placement. These positioners can offer resolutions as fine as 3 µm, with travel ranges typically around 12 mm for X, Y, and Z axes. Some advanced models feature submicron stage accuracy and micrometer-accuracy repeatable probe placement.
* **Contact Resistance:** Designed for low and stable contact resistance, particularly on aluminum pads.
* **Accuracy:** Engineered for precise and repeatable measurements. Advanced technologies like High Thermal Stability (HTS) are available for maintaining stability over temperature fluctuations, enabling small pad probing across a wide temperature range (-60°C to 300°C).
* **Pad Geometry:** Enables shrinking of pad geometries to as small as 25 x 35 µm (best case), reducing parasitic effects and saving wafer space.
* **Calibration:** Supports seamless calibration with standard characterization instruments and Vector Network Analyzers (VNAs). Calibration can be performed using Impedance Standard Substrates (ISS).

### Physical Characteristics

* **Dimensions:** Approximately 25″ x 22″ x 21.5″ H.
* **Weight:** Not specified in available documentation.
* **Materials:** Construction emphasizes durability and precision for RF applications. Specific material compositions for advanced features like High Thermal Stability (HTS) include low-thermal expansion materials.

### Interfaces

* **RF Signal Connector:** SMA RF signal connector is present on some RF-1 variants, such as the SpectraDynamics RF-1 Power Meter. However, the Cascade Microtech RF-1 is a probe station component and relies on the probe arms and other station interfaces for connectivity.
* **Programming Connector:** Some RF-1 models (e.g., SpectraDynamics RF-1 Power Meter) feature a programming connector intended for factory use only.
* **Probe Arms:** Compatible with various probe arms, including Infinity Probes®, designed for high performance RF measurements.

### Compatibility

* **Probe Stations:** Designed to integrate with Cascade Microtech and FormFactor probe stations, including Summit series, S300, Elite300, and MPS150 models.
* **Vector Network Analyzers (VNAs):** Mates with VNAs for seamless calibration and integration.
* **Calibration Standards:** Compatible with NIST-verified Impedance Standard Substrates (ISS).
* **Wafer Sizes:** Supports standard wafer sizes, including 100 mm, 150 mm, and 200 mm.

Why Choose Aumictech for Cascade Microtech RF-1?
At Aumictech, we specialize in supplying high-end semiconductor test equipment. Whether you need precise on-wafer RF measurements, reliable device characterization, or robust solutions for RF and microwave testing, our team ensures the Cascade Microtech RF-1 delivers maximum performance for your application.