H-SQUARE WT6HAS Manual Horizontal Wafer Transfer

The H-SQUARE WT6HAS is a manual horizontal wafer transfer system engineered for safe, efficient handling in semiconductor manufacturing environments. Operating via horizontal slide-transfer mechanics between two cassettes, it enables precise wafer movement while minimizing contamination and mechanical damage risk. The system supports 76 mm, 100 mm, 150 mm, and 200 mm wafer sizes and integrates across shipping, receiving, process, and metrology workflows. ESD-safe construction with antistatic Polyoxymethylene arm and Kynar® PVDF wafer contact surfaces ensures compatibility with cleanroom operations, including wet-chemistry and thermal-process areas.

– Technical Specifications

• Wafer Transfer Method: Horizontal slide-transfer between cassettes
• Wafer Size Compatibility: 76 mm, 100 mm, 150 mm, 200 mm
• Cassette Compatibility: High and low profile cassettes; shipping cassettes with H-BAR; plastic process cassettes; metal cassettes
• Cleanroom Ratings: ISO Class 5 (FS209E Class 10); Class 10 compatible
• Arm Material: Antistatic Polyoxymethylene
• Wafer Contact Material: Kynar® PVDF (high purity, wear-resistant, chemical-resistant)
• ESD Construction: Antistatic throughout
• Chemical Resistance: Chemical-resistant material construction
• Maintenance Profile: Very low maintenance design
• Environment: Suitable for wet areas

– Key Features

• Tabletop form factor for integration into existing fab workflows
• Optional 180° inversion models available for 150 mm and 200 mm wafers to enable backside processing
• Eliminates manual wafer handling risk in wet chemistry and thermal bake applications
• Durable PVDF contact surfaces resist corrosive process chemicals and thermal cycling

– Typical Applications

• Shipping and receiving transfer to work-in-progress cassettes
• Epitaxial process cassette loading
• Wet chemistry process transfers to Teflon PFA cassettes
• Thermal process transfer to metal or quartz cassettes
• Wafer metrology and inspection preparation
• Probe and test area staging
• Backside wafer processing via optional inversion capability

– Compatibility & Integration

The WT6HAS accommodates both standard SEMI cassette formats and specialized process cassettes, making it suitable for mixed-cassette environments. Its low-maintenance design and chemical-resistant construction support extended operation in corrosive wet-chemistry and high-temperature areas without performance degradation.