Keithley 590 1MHz/100k C-V Analyzer

The Keithley 590 C-V Analyzer is a precision instrument for capacitance-voltage and capacitance-time measurements in semiconductor device characterization and quality control. Dual-frequency operation at 100 kHz and 1 MHz enables compliance with established test standards while optimizing resolution and accuracy. The analyzer measures capacitance, conductance, and voltage to extract critical device parameters including doping profiles, threshold voltage, oxide properties, mobile ion density, interface trap density, and minority carrier lifetime.

## Technical Specifications

**Measurement Parameters:**
• Capacitance: 10 fF to 20 nF (100 kHz); sensitivity 0.1 fF
• Conductance: 0.1 nS to 1 µS; sensitivity 0.1 nS
• Test signal: 15 mV rms ±10%
• Frequency tolerance: ±0.1%

**Bias Sources:**
• Internal: -20.000V to +20.000V, 5 mV steps, ±50 mA max, <1 ms settling
• External: Up to ±200V DC input, 50 mA max

**Measurement Performance:**
• Rate: 1 to 1000 readings/second, selectable
• Accuracy: ±0.06% at 100 kHz, ±0.08% at 1 MHz
• Capacitance non-linearity: 20 or D < 0.05, 18–28°C)

**Data Handling:**
• Buffers A & B: 450 measurement triplets each (C, G, V)
• C-t storage: Up to 1350 points

**Waveform Modes:** DC, Stair, Dual Stair, Pulse

## Key Features

• Internal correction for transmission line and connection errors
• Built-in correction value storage and analysis
• Normalized capacitance calculation (C/C₀) and derived functions (1/C²)
• C-V curve plotting capability
• Operating range: 0°C to 50°C

## Typical Applications

Doping profile analysis, threshold voltage extraction, oxide characterization, mobile ion density assessment, interface trap density evaluation, minority carrier lifetime determination.