Keithley S400 Parametric Tester

The Keithley S400 Parametric Test System is a dedicated automated platform for comprehensive electrical characterization of semiconductor devices in manufacturing environments. It delivers picoampere-level measurement sensitivity with integrated electrometer technology, supporting process monitoring, device characterization, and quality control in semiconductor fabrication. The system combines hardware and software automation with flexible test development pathways and migration routes from legacy systems.

– Technical Specifications

The integrated System Measurement Module (SMM) incorporates a Keithley Model 617 Electrometer with current measurement resolution down to 10 fA. Multi-range architecture provides optimized accuracy across current levels:

• 200 pA range: 10 fA resolution, ±(1.6 + 1)% accuracy
• 2 nA range: 100 fA resolution, ±(0.25 + 5)% accuracy
• 20 nA range: 1 pA resolution, ±(0.25 + 1)% accuracy
• 200 nA range: 10 pA resolution, ±(0.25 + 1)% accuracy
• 2 µA range: 100 pA resolution, ±(0.15 + 4)% accuracy

System-level performance achieves approximately 3 pA with consideration for matrix leakage (0.2 pA/V on high-quality pathways, 2.0 pA/V on standard pathways) and offset specifications.

– Key Features

Optional instrumentation expands measurement capability:

• Capacitance meters operating at 100 kHz or 1 MHz with 45 mV drive level and ±2 Sigma conductance of 0.3 µS
• Agilent 4284 LCR meter integration for multi-frequency capacitance characterization
• Keithley Model 2000 DMM for microvolt-level resolution
• Keithley Model 776 Frequency Counter for ring oscillator and timing measurements
• High voltage sourcing and measurement modules
• High current pulsed voltage source (MIVS) for transient testing
• High current Source Measure Units (SMU) for precision sourcing and measurement
• VME-based 9162-PAU module enabling high-speed picoamp-level measurements

– Typical Applications

Process monitoring and statistical device characterization in semiconductor manufacturing. Leakage current measurement, capacitance profiling, and electrical parameter verification during wafer-level and device-level testing.

– Compatibility & Integration

The S400UX iteration provides automated integration of hardware and software. Migration pathways from S425/S450 systems enable evaluation deck portability and test program reuse.