Keithley S600

The Keithley S600 Series Parametric Test System is a modular, configurable platform for semiconductor device characterization designed to reduce cost of test across fabs and wafer foundries. Built on flexible architecture supporting per-pin electronics, the S600 delivers current and voltage source/measurement plus capacitance measurement on each DUT pin. Its high throughput and femtoamp-level sensitivity enable production testing of SoC, FeRAM, MRAM, PCRAM, and high-density devices while protecting test software investment through platform compatibility.

## Technical Specifications

• Measurement ranges: fA to 1 A (current); µV to 200 V (voltage, all Kelvin)
• RF capability: On-wafer s-parameter testing to 40 GHz with integrated Vector Network Analyzer
• Per-pin architecture with bi-directional current scaling amplifiers on each probing pin
• S680 configuration features active electronics mounted directly on prober

## Key Features

• Per-pin source/measure units (SMUs) with full source/measure capability on all pathways and pins
• Superior DC measurement capability with broad testing flexibility
• Capacitance measurement on each pin
• RF option integrates DC and RF testing in single-insertion system
• Eliminates noise artifacts and second-order effects including leakage and parasitic capacitance
• S680 configuration supports femtoamp-level DC leakage characterization, ultra-thin gate dielectrics, SOI, and new materials

## Typical Applications

• Process control and equipment tuning/optimization
• Wafer acceptance testing and qualification
• Device modeling and characterization
• New technology device testing (SoC, FeRAM, MRAM, PCRAM, high-density devices)

## Compatibility & Integration

Keithley Test Environment (KTE) software provides high platform-to-platform compatibility across S600 Series testers. KTE runs on Linux or Solaris/UNIX platforms, ensuring smooth migration paths and protecting test software investment during system upgrades.