Keithley SMU4210 SMU High Power Source-Measure Unit for 4200-SCS

The Keithley SMU4210 is a high-power source-measure unit (SMU) engineered for integration with the Keithley 4200-SCS parameter analyzer. This four-quadrant device delivers 20 W nominal power output (up to 22 W) and combines precise voltage and current sourcing with simultaneous measurement, making it essential for advanced semiconductor characterization, materials research, and high-power device testing.

## Technical Specifications

**Voltage Sourcing & Measurement**
• Source range: ±200 V to ±0.2 µV, maximum 210 V output
• Measure range: ±200 V with resolution down to 0.2 µV on the 200 mV range
• Accuracy: ±(0.015% + 3 mV) on the 200 V range

**Current Sourcing & Measurement**
• Source range: 100 fA to 1 A (1.05 A maximum)
• Measure range: 100 fA to 1 A with 100 fA resolution
• Accuracy: ±(0.050% + 1 pA) on the 10 nA range with optional 4200-PA preamp
• Optional preamp achieves resolution to 0.1 fA or 10 aA

**Compliance**
• Voltage and current compliance: Bipolar limits between full scale and 10% of selected range

**Electrical Characteristics**
• Output connectors: Dual mini-triaxial (female) and 5-way binding post
• 4-wire Kelvin connections for low-resistance measurements
• Floating voltage: ±32 V from chassis ground
• Overshoot: <0.1% typical
• Range transient: <200 mV for both voltage and current ranging

## Key Features

• Four-quadrant source/sink operation enables bidirectional testing
• DC I-V measurement capability with Very Low Frequency and Quasi-Static C-V measurement support
• Configurable voltage and current compliance for device protection
• 4-wire Kelvin measurement topology eliminates lead-resistance errors

## Typical Applications

• Semiconductor device characterization and parametric testing
• Materials and component research requiring high-voltage/current sourcing
• Device reliability and stress testing
• Capacitance-voltage characterization

## Compatibility & Integration

Designed for module slot 4 installation in the 4200A-SCS mainframe. Operating temperature range: +10°C to +40°C. Module weight: 1.81 kg.