Keithley Yieldstation S900 Semiconductor Parametric Test System/Process Monitor

The Keithley Yieldstation S900 is a semiconductor parametric test system and process monitor for electrical characterization of semiconductor devices and manufacturing processes. It delivers precise measurements of critical device parameters to ensure quality control and drive process optimization across semiconductor fabrication. The system enables detailed process monitoring to boost yield and quality through comprehensive electrical testing and parametric analysis.

## Technical Specifications

System Type: Semiconductor Parametric Test System and Process Monitor

Primary Function: Electrical characterization of semiconductor devices and processes; quality control; process optimization; yield analysis.

Architecture: Modular design with multiple instrument slots and interface cards. Integrates Source-Measure Units (SMUs) for voltage/current sourcing and response measurement. Includes capacitance/conductance meters for dielectric and capacitive parameter analysis. Low-level current measurement capabilities extend to picoammeter range. Switch matrix routes test signals to device under test. Probe card adapter interfaces with wafer probes and packaged devices.

## Key Features

• Source-Measure Units (SMUs) for precision voltage and current generation
• Capacitance/conductance measurement for dielectric characterization
• Picoammeter-range current measurement for low-level parametric testing
• Switch matrix for flexible DUT signal routing
• Modular instrumentation architecture supporting multiple test configurations
• Probe card adapter for wafer and packaged device interfacing

## Control & Software

Dedicated workstation control with specialized test executive software. Unix-based system operation (Solaris). Measurement libraries support semiconductor technologies including CMOS and BiCMOS. System Reference Units (SRUs) available for calibration time reduction.

## Typical Applications

• Parametric testing of semiconductor wafers and packaged devices
• Process monitoring during semiconductor manufacturing
• Device yield optimization and analysis
• Manufacturing process characterization and trending
• Quality assurance and statistical process control

## Compatibility & Integration

Designed to interface with automated probers and handlers via probe card adapter. Integrates Test Star components and Keithley instrumentation modules for expanded measurement capabilities. Host computer connectivity enables remote programming and system control.