Keysight (Agilent) M9614A PXIe 5-channel Source/Measure Unit

The Keysight M9614A is a single-slot PXIe 5-channel Source/Measure Unit delivering integrated sourcing and measurement across five independent channels in a dense form factor. Each channel sources up to 30 V and 500 mA (DC and pulse) while simultaneously measuring both parameters with 6 μV voltage resolution and 100 pA current resolution. Four-quadrant operation enables bidirectional sourcing and measurement for comprehensive device characterization. The module supports 2-wire and 4-wire measurement configurations with guard terminal connectivity, making it ideal for precision semiconductor testing and IC characterization where channel density and measurement accuracy are critical. PXIe architecture ensures 500 kSa/s sampling and system synchronization, while dynamic pulsed measurement capability with 100 μs minimum pulse width accommodates time-dependent device behavior. Seamless current measurement ranging automatically selects optimal measurement precision across four ranges, eliminating manual range switching and reducing test time. Low source noise—below 20 μVpp in the 0.1–10 Hz band and 75 pArms at 1 PLC—supports high-fidelity characterization. Over-temperature protection shuts down the SMU upon internal sensor activation, safeguarding both the device and test setup.

– Technical Specifications

• Channels: 5 independent SMU channels per module
• Form Factor: Single-slot PXIe module
• Voltage Output: 0–30 V maximum
• Current Output: 500 mA (DC and pulse)
• Voltage Measurement Resolution: 6 μV minimum
• Current Measurement Resolution: 100 pA minimum
• Quadrant Operation: 4-quadrant sourcing and measurement
• Measurement Configuration: 2-wire and 4-wire with guard terminal
• Pulse Width: 100 μs minimum
• Sampling Rate: 500 kSa/s maximum
• Source Noise (0.1–10 Hz): <20 μVpp voltage; <440 pApp current
• RMS Noise (1 PLC): 75 pArms current
• Power Dissipation: 12.6–22.5 W (typical, depending on range and quadrant)
• Thermal Protection: Over-temperature shutdown
• Backplane Current Requirement: 4 A or 6 A chassis support

– Key Features

• Seamless current measurement ranging expands dynamic range and reduces test duration
• Dual ranging group selection covers four measurement ranges concurrently
• Pulsed measurement capability for transient analysis
• Low-noise performance suitable for precision characterization
• Compact five-channel density in single PXIe slot

– Typical Applications

• Semiconductor device reliability testing
• Integrated circuit (IC) parametric testing
• Component characterization with high channel density requirements
• Automated test systems demanding simultaneous source and measure functionality

– Compatibility & Integration

Requires PXIe chassis with 4 A or 6 A backplane current capacity. Supports 2-wire and 4-wire measurement architectures with guard terminal for noise rejection.