KLA Tencor P-11

The KLA Tencor P-11 is a PC-controlled stylus surface profiler engineered for high-precision measurement of surface topography, thin-film stress, and roughness across semiconductor wafers, optical surfaces, and precision-engineered materials. Operating via Windows-based software, the instrument delivers 2D and 3D surface analysis with vertical resolution options of 0.5 Å, 2 Å, or 10 Å, and measures vertical features from under 100 Å to approximately 300 µm. The P-11 accommodates wafer sizes up to 8″ / 200 mm and supports scan lengths up to 205 mm with virtually unlimited data points per profile.

## Technical Specifications

• Vertical measurement range: <100 Å to ~300 µm
• Vertical resolution: 0.5 Å, 2 Å, or 10 Å (selectable)
• Maximum scan length: 205 mm (8.1 in.)
• Maximum wafer size: 8" / 200 mm diameter
• Horizontal resolution: Limited by stylus radius
• Power: 115 V, 4 A, 1 Phase, 60 Hz

## Key Features

• Roughness, waviness, and step height measurement with automated edge/apex detection
• Thin-film stress and sample bow calculations
• User-selectable cutoff filters for roughness and waviness isolation
• Scan leveling and fitting for step height measurement on curved surfaces
• Repetitive scanning up to 10× with automatic averaging
• Optical lever sensor technology in stylus measurement head
• Photo-realistic 3D rendering of surface scan data
• Precision leadscrew-driven sample stage
• Low-force control with enhanced environmental isolation

## Typical Applications

• Semiconductor wafer surface characterization
• Thin-film head metrology
• Precision-machined and polished surface analysis
• Microelectronics ceramic surfaces
• Flat-panel display glass substrates
• Optical surface inspection

## Compatibility & Integration

• Windows-based control software
• PC-controlled operation and automated measurement
• Compatible with materials ranging from semiconductors to optical substrates