Stanford Research QMS200

The Stanford Research QMS200 is a residual gas analyzer (RGA) engineered for high-pressure sampling and continuous on-line monitoring of trace gases in vacuum systems. It delivers precise detection and quantification across a mass range to 200 amu, with sub-second response time and a 6-decade dynamic range. The instrument combines a two-stage pressure-reducing inlet system with hybrid oil-free pumping to enable operation from atmospheric pressure down to the low 10⁻⁶ mbar range, making it ideal for leak detection, vacuum system diagnostics, and gas purity verification.

– Technical Specifications

• Mass range: up to 200 amu
• Pressure range: 10 mbar to 1 bar inlet; operating pressure down to 5 × 10⁻⁶ mbar
• Mass resolution: better than 1 amu
• Response time: less than 0.5 seconds
• Dynamic range: 6 decades
• Detection limit: less than 1 ppm
• Sampling flow rate: several milliliters per minute
• Spectral scan rate: complete spectra in seconds
• Mass measurement rate: up to 25 points per second
• Start-up time: approximately 5 minutes
• Maximum ambient temperature: 35 °C
• Power: 110 VAC/60 Hz or 220 VAC/50 Hz (not field selectable)
• Computer interface: RS-232, 28.8 kbaud, DB9 connector

– Key Features

• Two-stage capillary inlet system reduces high inlet pressures to RGA operating range
• Capillary materials: stainless steel or PEEK
• Hybrid turbomolecular/drag pump with integral diaphragm pump; both oil-free
• Compact, transportable design—operates upright or on its side
• Dimensions: 7.06″ W × 17.25″ D × 24.80″ H; weight 75 lbs
• Continuous data acquisition with real-time spectral recording

– Typical Applications

• Leak detection in vacuum systems
• Trace gas monitoring and analysis
• Gas purity verification
• Residual gas composition measurement

– Compatibility & Integration

• Optional high-vacuum 2.75″ CF port for direct RGA access
• RGA Windows software with analog/histogram scan modes, pressure-vs.-time plotting, leak detection, gas library, and audio/visual alarms
• High-level ASCII command set and LabVIEW driver for custom integration